▎ 摘　　要

NOVELTY - The integrated circuit (200) structure has a dielectric material (212) having an opening which is defined by sides and a bottom. A graphene barrier material (214) is set to conform to the sides and bottom of the opening. A conductive metal (215) over the graphene barrier material fills at least a portion of a remainder of the opening in the dielectric material. USE - Integrated circuit structure contained in electronic device such as desktop, laptop, server, cell phones, electronics for personal use. ADVANTAGE - The improved electrical properties and lower electromigration failures in SoCs of future technology nodes are realized. The use of graphene as a barrier material provides improved electrical properties and, among other advantages, fewer electromigration failures. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following: (1) a method of manufacturing an integrated circuit; and (2) a method of activating a dielectric surface for graphene deposition. DESCRIPTION OF DRAWING(S) - The drawings show schematic view of the portion of an integrated circuit showing a cross-sectional view of circuitry. (Drawing includes non-English language text) Integrated circuit (200) Dielectric material (212) Graphene barrier material (214) Conductive metal (215) Interconnection (216)