• 专利标题:   Laser processing method of nitrogen-doped micro-structure, involves processing micro-cavity on upper surface of graphene oxide film, and reducing graphene oxide of nitrogen-doped microstructure during laser direct writing process.
  • 专利号:   CN103626118-A
  • 发明人:   SUN H, ZHANG Y, CHEN Q, GUO L
  • 专利权人:   UNIV JILIN
  • 国际专利分类:   B81C001/00
  • 专利详细信息:   CN103626118-A 12 Mar 2014 B81C-001/00 201429 Pages: 11 Chinese
  • 申请详细信息:   CN103626118-A CN10636263 30 Nov 2013
  • 优先权号:   CN10636263

▎ 摘  要

NOVELTY - The method involves preparing a graphene oxide film (9) on the upper portion of a substrate (8). A micro-cavity is processed on the upper surface of the graphene oxide film. The graphene oxide process is performed under ammonia (NH3) condition. The graphene oxide of a nitrogen-doped microstructure is reduced during laser direct writing process. USE - Laser processing method of nitrogen-doped micro-structure of micro-nano processing system. ADVANTAGE - The precision of laser processing can be improved. The laser processing power can be improved. The doping concentration can be adjusted efficiently. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the laser processing system. Laser (1) Lens (2) Reflecting mirror group (3) Substrate (8) Graphene oxide film (9)