• 专利标题:   Preparation of doped graphene involves providing substrate, forming protective layer on graphene layer, injecting doping element into graphene layer from upper surface of protective layer using ion implantation process and activating.
  • 专利号:   CN108862252-A
  • 发明人:   ZHANG M, GAO M, HAN X, JIA P, XUE Z, DI Z
  • 专利权人:   SHANGHAI INST MICROSYSTEM INFORMATION, UNIV CHINESE ACAD SCI
  • 国际专利分类:   C01B032/186, C01B032/194
  • 专利详细信息:   CN108862252-A 23 Nov 2018 C01B-032/186 201908 Pages: 12 Chinese
  • 申请详细信息:   CN108862252-A CN10736450 06 Jul 2018
  • 优先权号:   CN10736450

▎ 摘  要

NOVELTY - The preparation method of doped graphene involves providing substrate and then processing to obtain graphene layer, forming protective layer on graphene layer, completely covering protective layer using graphene layer, injecting doping element into graphene layer from upper surface of protective layer using ion implantation process, removing protective layer and then exposing graphene layer, performing graphene repair growth on exposed graphene layer by using chemical vapor deposition process to repair lattice damage caused by ion implantation in graphene layer and activating. USE - The method is useful for preparation of doped graphene. ADVANTAGE - The method enables preparation of doped graphene with high quality.