▎ 摘　　要

NOVELTY - The modulator comprises an upper half (10) and a lower half (11) of a silicon-based photonic crystal microcavity with a slot waveguide defect (1), a graphene layer (2), a heavily doped silicon flat plate (3), and an intermediate insulating layer, a line defect channel waveguide, a nanowire silicon waveguide (8), a mode conversion waveguide (9), a trench (12), and two metal electrode layers (4, 5). USE - Photonic crystal micro-cavity-graphene electro-optical modulator used in photoelectric technical field. ADVANTAGE - The modulator: has compact structure, high modulation depth, ultra-fast frequency response, low energy consumption, ultra-compact structure, and simple preparation process; improves the single chip integration degree of the device; and is completely compatible with the existing complementary metal oxide semiconductor (CMOS) integrated process. DESCRIPTION OF DRAWING(S) - The drawing shows a top view of the photonic crystal micro-cavity-graphene electro-optical modulator. Slot waveguide defect (1) Graphene layer (2) Heavily doped silicon flat plate (3) Nanowire silicon waveguide (8) Upper half (10) Lower half (11) Trench (12) Metal electrode layer (4,5)