• 专利标题:   Thermosymmetric infrared detector for use in e.g. mobile phone application field, has column-level analogue front end circuit for performing trans impedance amplification to two paths of current and outputs as output voltage.
  • 专利号:   CN113447143-A, CN113447143-B
  • 发明人:   PAN H, WU P, DI G
  • 专利权人:   BEIJING NORTH GAOYE TECHNOLOGY CO LTD
  • 国际专利分类:   G01J005/24
  • 专利详细信息:   CN113447143-A 28 Sep 2021 G01J-005/24 202187 Chinese
  • 申请详细信息:   CN113447143-A CN10713208 25 Jun 2021
  • 优先权号:   CN10713208

▎ 摘  要

NOVELTY - The detector has a complementary metaloxidesemiconductor CMOS process for preparing a CMOS measuring circuit system and a CMOS infrared sensing structure. An upper end of the CMOS measuring circuit system comprises a single layer of a sealed releasing insulating layer. The sealed releasing insulating layer manufactures the CMOS infrared sensing structure to release an etching process. A CMOS manufacturing process of the CMOS infrared sensing structure comprises a metal interconnection process, a through hole process, an IMD process and a RDL process. A column-level analogue front end circuit performs a trans impedance amplification to two paths of current and outputs as an output voltage. USE - Thermal symmetry type infrared detector for use in mobile phone application field. Uses include but are not limited to background monitoring market, vehicle auxiliary market, household market and intelligent manufacturing market. ADVANTAGE - The detector reduces problem of low performance, low pixel scale, low yield and bad consistency and the total thermal conductivity of the infrared detector, and improves the structure stability of the detector, and realizes better product of chip, low cost, high yield and large scale integrated production of target, thus provides wider application market for infrared detector.