• 专利标题:   Manufacture of graphene-grown substrate for electronic component, involves providing metal layer on substrate, supplying etching gas and carbon-containing gas, and growing graphene on metal layer by thermal chemical vapor deposition.
  • 专利号:   KR2016044609-A
  • 发明人:   LEE Y T
  • 专利权人:   LEE Y T
  • 国际专利分类:   C01B031/02, C01B031/04
  • 专利详细信息:   KR2016044609-A 26 Apr 2016 201638 Pages: 48 English
  • 申请详细信息:   KR2016044609-A KR133707 05 Oct 2014
  • 优先权号:   KR133707

▎ 摘  要

NOVELTY - Manufacture of graphene-grown substrate involves providing metal layer on substrate, supplying etching gas and carbon-containing gas, performing rapid thermal chemical vapor deposition, growing graphene on the metal layer, continuously performing rapid thermal chemical vapor deposition and removing metal layer. USE - Manufacture of graphene-grown substrate used in manufacture of electronic component (all claimed). DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following: (1) graphene-grown substrate; and (2) manufacture of electronic component.