▎ 摘 要
NOVELTY - Manufacture of graphene-grown substrate involves providing metal layer on substrate, supplying etching gas and carbon-containing gas, performing rapid thermal chemical vapor deposition, growing graphene on the metal layer, continuously performing rapid thermal chemical vapor deposition and removing metal layer. USE - Manufacture of graphene-grown substrate used in manufacture of electronic component (all claimed). DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following: (1) graphene-grown substrate; and (2) manufacture of electronic component.