• 专利标题:   Formation of metal oxide layer for electronic device, involves surface-modifying graphene, and forming metal oxide layer surface-modified graphene by atomic layer deposition.
  • 专利号:   KR2018075898-A, KR1939450-B1
  • 发明人:   ZONG H L, HYO K H, HOON L Z, KI H H
  • 专利权人:   UNIST ULSAN NAT SCI TECHNOLOGY INST
  • 国际专利分类:   H01L021/02, H01L021/28, H01L029/16, H01L029/51
  • 专利详细信息:   KR2018075898-A 05 Jul 2018 H01L-021/02 201853 Pages: 35
  • 申请详细信息:   KR2018075898-A KR179826 27 Dec 2016
  • 优先权号:   KR179826

▎ 摘  要

NOVELTY - Formation of metal oxide layer involves surface-modifying graphene, and forming metal oxide layer surface-modified graphene by atomic layer deposition. USE - Formation of metal oxide layer for electronic device e.g. light-emitting device, diode, transistor, tunneling device, binary junction transistor, varistor, field-effect transistor, memory device, solar cell, photo detector, logic device, energy storage device, display device and sensor (all claimed) e.g. optical sensor and gas sensor. ADVANTAGE - The method enables formation of metal oxide layer having excellent light transmittance, band gap energy, optical clarity and quantum confinement effect.