▎ 摘 要
NOVELTY - A flexible substrate processing apparatus comprises: a substrate carrying-out portion (110) containing a first unwinder (112) provided with a first bobbin (111); a reduction treatment portion (120) containing a first bath (121) configured to be provided with an electrolyte (123), a first electrode (122), and first rollers (221, 222); a washing portion (130) containing a second bath (131) and second rollers (231, 232); a drying portion (140) containing a first drying units (141); and a substrate carrying-in portion (150) containing a winder (152) provided with a second bobbin (151). USE - As flexible substrate processing apparatus for reducing graphene oxide to form graphene (claimed); and for manufacturing power storage devices such as lithium secondary batteries. ADVANTAGE - The flexible substrate processing apparatus allows the formation of graphene having high conductivity on a flexible substrate; permits the stable reduction of an oxide formed on a flexible substrate; improves the quality and productivity of a product including a film-like structure body formed on a flexible substrate; can efficiently produce the positive electrode and the negative electrode of a power storage device; and can efficiently produce a stack of a positive electrode, a separator, and a negative electrode. DETAILED DESCRIPTION - A flexible substrate processing apparatus comprises: a substrate carrying-out portion (110) containing a first unwinder (112) provided with a first bobbin (111) configured so that a flexible substrate (100) is wound around the first bobbin; a reduction treatment portion (120) containing a first bath (121) configured to be provided with an electrolyte (123), a first electrode (122) configured so that the flexible substrate is located in parallel with the first electrode in the first bath, and first rollers (221, 222) configured so that the flexible substrate is soaked in the electrolyte; a washing portion (130) containing a second bath (131) configured to be provided with a washing solution (133) and second rollers (231, 232) configured to support the flexible substrate so that the flexible substrate is soaked in the washing solution; a drying portion (140) containing a first drying units (141); and a substrate carrying-in portion (150) containing a winder (152) provided with a second bobbin (151) configured to take up the flexible substrate, where the substrate carrying-out portion, the reduction treatment portion, the washing portion, the drying portion, and the substrate carrying-in portion are combined in this order in a flexible substrate carrying path, and where at least one of the first bobbin, second bobbin, first roller, and the second roller serve as a second electrode. An INDEPENDENT CLAIM is included for reducing graphene oxide to form graphene with the use of a flexible substrate processing apparatus involving making the flexible substrate be contact with the first bobbin and taking the flexible substrate up in the substrate carrying-out portion; making the flexible substrate and the first electrode be soaked in the electrolyte in the first bath; reducing graphene oxide contained in a film-like structure body formed on the flexible substrate to form graphene by supplying a certain potential to the second electrode so that the flexible substrate is at the same potential as the second electrode; washing the film-like structure body and the flexible substrate in the second bath; drying the film-like structure body and the flexible substrate with the use of the drying units in the drying portion; and taking the flexible substrate up by the second bobbin. DESCRIPTION OF DRAWING(S) - The figure shows a view of flexible substrate processing apparatus. Flexible substrate (100) Substrate carrying-out portion (110) First bobbin (111) First unwinder (112) Reduction treatment portion (120) First bath (121) First electrode (122) Electrolyte (123) Washing portion (130) Second bath (131) Washing solution (133) Drying portion (140) First drying units (141) Substrate carrying-in portion (150) Second bobbin (151) Winder (152) First rollers (221, 222) Second rollers (231, 232)