▎ 摘　　要

NOVELTY - The sensor (100) has a graphene oxide component (110) provided in electrical communication with each of first and second electrodes (120, 130), where a response time of the sensor to a step change in an ambient relative humidity from 10 percentage relative humidity to 50 percentage relative humidity is less than or equal to 1 minute, and a resistivity of the graphene oxide component varies linearly with an ambient relative humidity when the ambient relative humidity is greater than or equal to 10 percentage and less than or equal to 60 percentage. USE - Sensor e.g. graphene oxide sensor and conduct metric gas sensor, for detecting a species e.g. gas, water, ammonia, oxygen, carbon tetrafluoride, nitrous oxide, halogens, hydrochloric acid and hydrofluoric acid (all claimed). ADVANTAGE - The sensor detects small quantities of reactive gases downstream of a semiconductor process chamber from a mass balance perspective for calculating destructive efficiency of gas abatement equipment, and is beneficial for industrial installations to comply with environmental regulations. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are also included for the following: (1) a method for forming a thin film or sensor component (2) a method for detecting a species. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a sensor comprising first and second electrodes, and a graphene oxide component. Sensor (100) Graphene oxide component (110) Electrodes (120, 130)