• 专利标题:   Method for manufacturing SERS substrate based on graphene quantum dot array, involves placing semi-finished product into magnetron sputtering device, and selecting metal oxide from titanium dioxide, zinc oxide, tin dioxide and indium oxide.
  • 专利号:   CN111441032-A
  • 发明人:   SUI X
  • 专利权人:   QINGDAO FENGLUAN NEW MATERIAL TECHNOLOGY CO LTD
  • 国际专利分类:   C23C014/18, C23C014/35, C23C014/58, C23C016/02, C23C016/26, C23C016/56, G01N021/65
  • 专利详细信息:   CN111441032-A 24 Jul 2020 C23C-016/26 202065 Pages: 6 Chinese
  • 申请详细信息:   CN111441032-A CN10442203 22 May 2020
  • 优先权号:   CN10442203

▎ 摘  要

NOVELTY - The method involves forming an insulating substrate. Surface pretreatment is performed on the insulating substrate. A graphene layer is placed on a surface of the insulating substrate. Chemical vapor deposition is performed a surface of a graphene quantum dot array. Oxidation annealing treatment is performed. The insulating substrate deposited on the graphene quantum dot array is annealed to remove an intermediate graphene quantum dot array. A semi-finished product is placed into a magnetron sputtering device. Metal oxide is selected from titanium dioxide, zinc oxide, tin dioxide and indium oxide. USE - Method for manufacturing a SERS substrate based on graphene quantum dot array (claimed). ADVANTAGE - The method enables increases a specific surface area and enhances a signal strength of the detected molecule.