• 专利标题:   Graphene FET, has first gate electrode comprising multiple spaced sub-electrodes, where each sub-electrode and second gate electrode are formed with longitudinal electric field vertical to channel layer.
  • 专利号:   CN110323266-A
  • 发明人:   QIN X, XU H
  • 专利权人:   HUAWEI TECHNOLOGIES CO LTD
  • 国际专利分类:   H01L029/06, H01L029/16, H01L029/78
  • 专利详细信息:   CN110323266-A 11 Oct 2019 H01L-029/06 201986 Pages: 32 Chinese
  • 申请详细信息:   CN110323266-A CN10268710 28 Mar 2018
  • 优先权号:   CN10268710

▎ 摘  要

NOVELTY - The FET has a source electrode and a drain electrode respectively distributed on two sides of a channel layer. The channel layer is made of AB stacking dual-layer graphene or AB stacking multi-layer graphene. A first gate electrode and a first gate dielectric layer are located on a side of the channel layer. A second gate electrode and a second gate dielectric layer are located on another side of the channel layer. The first gate electrode comprises multiple spaced sub-electrodes. Each sub-electrode and the second gate electrode are formed with longitudinal electric field vertical to the channel layer. USE - Graphene FET. ADVANTAGE - The FET improves device output resistance to improve on-off ratio so as to ensure better radio frequency performance. DESCRIPTION OF DRAWING(S) - The drawing shows a partial sectional view of a graphene FET.