▎ 摘　　要

NOVELTY - The apparatus (1) has a substrate (3) whose main surface is formed as a mounting surface (19) for mounting a plate-shaped sample (W). An electrode (13) for electrostatic attraction is provided on the opposite side of the mounting surface. The forming material of the substrate is a ceramic material. The ceramic material is a sintered compact that is comprised with aluminum oxide and silicon carbide as a main component and layered graphene in the grain boundary of the aluminum oxide. The sintered compact comprises silicon carbide of (beta)-silicon carbide type. USE - Electrostatic chuck apparatus. ADVANTAGE - The attractive force and frequency permeability of the electrostatic chuck apparatus are improved. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a manufacturing method of electrostatic chuck apparatus. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of the electrostatic chuck apparatus. Electrostatic chuck apparatus (1) Substrate (3) Electrode (13) Mounting surface (19) Plate-shaped sample (W)