• 专利标题:   Method for converting carbon nanotubes into graphene sheets involves etching using hydrogen plasma and at least one of glow discharge, diode, reactive ion etch, or electron-cyclonic resonance, latent defects in carbon nanotubes to split carbon nanotubes in longitudinal direction.
  • 专利号:   US11404643-B1
  • 发明人:   SOOD A K, EGERTON E J
  • 专利权人:   MAGNOLIA OPTICAL TECHNOLOGIES INC
  • 国际专利分类:   G01J005/02, G01J005/04, G01J005/24, H01L027/30, H01L051/00, H01L051/42, H01L051/44
  • 专利详细信息:   US11404643-B1 02 Aug 2022 H01L-051/00 202266 English
  • 申请详细信息:   US11404643-B1 US820043 16 Mar 2020
  • 优先权号:   US308688, US820043

▎ 摘  要

NOVELTY - Method for converting carbon nanotubes into graphene sheets involves etching using hydrogen plasma at 32-200degrees Fahrenheit and at least one of glow discharge, diode, reactive ion etch, or electron-cyclonic resonance, latent defects in carbon nanotubes to split carbon nanotubes in a longitudinal direction. USE - Method for converting carbon nanotubes into graphene sheets. ADVANTAGE - The method provides the graphene sheets with high porosity. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for method for fabricating graphene sheets from single wall carbon nanotubes, which involves: (a) suspending single wall carbon nanotubes in an aqueous or organic solvent solution; and (b) etching. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a microbolometer detecting element with a graphene sensing element fabricated on a generic complementary metal oxide semiconductor wafer process. Infrared detector (100) P-N junction substrate (101) Complementary metal oxide semiconductor logic (110) Film (120) Infrared sensor (130)