▎ 摘 要
NOVELTY - The nano-gold modified non-refrigerated infrared detector has a nichrome thin film bottom electrode (2), and a manganese cobalt are in turn on a silicon nitride microbridge substrate (1), the nickel-oxygen thin film heat-sensitive layer (3), a nano-gold modified layer (4) and single-layer graphene top electrode (5). An extension electrode (6) of titanum and golg is prepared on the edge of the nichrome thin film bottom electrode. The distance between the two portions of the rectangular electrode is 5-10 micrometers. The thickness of the nickel-oxygen heat-sensitive layer is 320-400 nanometers, covering the bottom electrode of the nichrome film and the middle slit. The size of the graphene top electrode is 4-8 micrometers smaller than the lower manganese-cobalt-nickel-oxygen film heat-sensitive layer. The nano-gold modification layer has a thickness of 10-20 nm. USE - Non-refrigerated infrared detector for modifying nano-gold. ADVANTAGE - The detector is easier to integrate compared with a manganese cobalt nickel oxide thick film device. The material thickness and the device heat capacity are reduced by 95%, the time constant is reduced by 80%, and high absorption of multiple important visible-infrared window wave bands are ensured. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method of making the nano-gold modified non-refrigerated infrared detector. DESCRIPTION OF DRAWING(S) - The drawing shows a side view of the structure of the infrared detector. Silicon nitride microbridge substrate (1) Nichrome thin film bottom electrode (2) Nickel-oxygen thin film heat-sensitive layer (3) Nano-gold modified layer (4) Graphene top electrode (5) Extension electrode (6)