• 专利标题:   Etched and transferred graphene film protection device has first clamp which is formed in square frame structure, and second clamp which is provided with multiple clamp columns, such that pair of clamps is connected through buckle.
  • 专利号:   CN204155906-U
  • 发明人:   LI Z, SHI H, ZHONG D, CUI H, TAN Q
  • 专利权人:   CHONGQING MOXI TECHNOLOGY CO LTD, CHINESE ACAD SCI CHONGQING GREEN INTEL
  • 国际专利分类:   H01L021/02, H01L021/687
  • 专利详细信息:   CN204155906-U 11 Feb 2015 H01L-021/02 201523 Pages: 13 Chinese
  • 申请详细信息:   CN204155906-U CN20646221 29 Oct 2014
  • 优先权号:   CN20646221

▎ 摘  要

NOVELTY - This new utility model relates to graphene thin film production device technology area, especially relates to a kind of protecting one graphene thin film etch and the transfer device, comprising the first clamp and the second clamp, the first clamp is square frame structure by the first column composed of the clamp, the second clamp is composed of four second clamp column composed of the square frame structure, square size and square size and the second clamp of the first clamp the same, and the first clamp is set with on the upper part of the second clamp, the first clamp and the second clamp by moving buckle connection, the first clamp and the second clamp between the clamp set with gap. This new utility model the beneficial effect is: using the first clamp and the second clamp composed of the transfer device, wherein the graphene sheet to carry out etching to the front process, can not only suitable to transfer the graphene sheet, and can damage the graphene sheet when in etching process to protect to avoid the graphene sheet contacting liquid tank bottom corrosion result in graphene thin film is.