• 专利标题:   Device for preparing graphene film with large crystal domain size, has supporting air pipe that is connected with external air source device, and driving component that is connected with substrate fixing component for pushing cover plate of fixing component to seal opening.
  • 专利号:   CN115215331-A
  • 发明人:   ZHANG Q
  • 专利权人:   SHENZHEN GLEIT TECHNOLOGY CO LTD
  • 国际专利分类:   C01B032/184, C01B032/186
  • 专利详细信息:   CN115215331-A 21 Oct 2022 C01B-032/186 202294 Chinese
  • 申请详细信息:   CN115215331-A CN10940528 06 Aug 2022
  • 优先权号:   CN10940528

▎ 摘  要

NOVELTY - The device has a machine seat (1) that is provided with a growing furnace (2). The growing furnace comprises a furnace tube (20) and a heating component. A substrate fixing component (3) comprises a cover plate (30) for sealing the opening. A main frame is connected with the supporting cover plate pipe (31). The main frame is provided with groups of mandrels that are capable of extending into the opening towards the opening. The end surfaces of the substrate around the reel are provided with a pressing sheet for fixing the metal substrate. The core shaft is a hollow pipe with opening ends. The air inlet is connected with the supporting air pipe. The supporting air pipe is connected with the external air source device. A driving component (4) is connected with the substrate fixing component for pushing the cover plate of the substrate fixing component to seal the opening. USE - Device for preparing graphene film with large crystal domain size used in graphene processing technology field. ADVANTAGE - The device has large crystal domain size, and ensures the film forming quality. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a device for preparing graphene film with large crystal domain size. 1Machine seat 2Growing furnace 3Substrate fixing component 4Driving component 5Air pressure monitoring sensor 20Furnace tube 30Cover plate 31Supporting cover plate pipe