▎ 摘 要
NOVELTY - The apparatus comprises a gas regulating valve (1), a mass flow meter (2), a high pressure negative power supply (3), a cathode electrode (4), a sample supporting frame (5), an anode electrode (6), a quartz tube (7), a vacuum pump (8), a vacuum valve (9), and a vacuum meter (10) which are connected with each other. The apparatus further comprises a lower end sealing rubber plug which is connected with the lower portion of quartz tube. The lower end of anode electrode is connected to the ground by the lower end sealing rubber plug. USE - Apparatus for preparing a graphene thin film using plasma. ADVANTAGE - A graphene thin film having high degree of graphitization and excellent performance is manufactured. The preparation time is reduced, and large scale industrial application is achieved. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for preparing a graphene thin film using plasma. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the graphene thin film preparation apparatus. Gas regulating valve (1) Mass flow meter (2) High pressure negative power supply (3) Cathode electrode (4) Sample supporting frame (5) Anode electrode (6) Quartz tube (7) Vacuum pump (8) Vacuum valve (9) Vacuum meter (10)