• 专利标题:   Apparatus for preparing graphene thin film using plasma, has a lower end sealing rubber plug connected with lower portion of quartz tube, while lower end of anode electrode is connected to the ground by a lower end sealing rubber plug.
  • 专利号:   CN104671237-A, CN104671237-B
  • 发明人:   BAO Z, CEN K, CHI Y, LI X, YAN J, QIAN J
  • 专利权人:   UNIV ZHEJIANG
  • 国际专利分类:   C01B031/04
  • 专利详细信息:   CN104671237-A 03 Jun 2015 C01B-031/04 201556 Pages: 11 Chinese
  • 申请详细信息:   CN104671237-A CN10057529 04 Feb 2015
  • 优先权号:   CN10057529

▎ 摘  要

NOVELTY - The apparatus comprises a gas regulating valve (1), a mass flow meter (2), a high pressure negative power supply (3), a cathode electrode (4), a sample supporting frame (5), an anode electrode (6), a quartz tube (7), a vacuum pump (8), a vacuum valve (9), and a vacuum meter (10) which are connected with each other. The apparatus further comprises a lower end sealing rubber plug which is connected with the lower portion of quartz tube. The lower end of anode electrode is connected to the ground by the lower end sealing rubber plug. USE - Apparatus for preparing a graphene thin film using plasma. ADVANTAGE - A graphene thin film having high degree of graphitization and excellent performance is manufactured. The preparation time is reduced, and large scale industrial application is achieved. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for preparing a graphene thin film using plasma. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the graphene thin film preparation apparatus. Gas regulating valve (1) Mass flow meter (2) High pressure negative power supply (3) Cathode electrode (4) Sample supporting frame (5) Anode electrode (6) Quartz tube (7) Vacuum pump (8) Vacuum valve (9) Vacuum meter (10)