▎ 摘　　要

NOVELTY - Manufacturing an electrostatic chuck involves (a) preparing a composite powder by ball-milling (i) aluminum or aluminum alloy powder and (ii) carbon-based nanomaterial powder, (b) preparing an electrode layer by subjecting the composite powder to spark plasma sintering (SPS), and (c) forming a dielectric layer on the electrode layer. USE - Method for manufacturing electrostatic chuck having high heat dissipation property, high resistance to thermal shock and lightness. ADVANTAGE - The electrostatic chuck having good durability, having a high heat dissipation property and high thermal shock resistance, and being lightweight, and also improves the efficiency of production of semiconductor devices. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for an electrostatic chuck, which is manufactured by the method.