▎ 摘　　要

NOVELTY - Flexible pressure sensor based on two-dimensional quantum tunneling force-sensitive mechanism, comprises a top electrode, a middle dielectric layer, a bottom electrode and a flexible substrate layer. The electrode top part is a conformal carbon nano thin film. The middle layer is a hydrogen-naphthalene (HBN). The bottom electrode is a single layer graphene. The conformalcarbon nano-film is composed of graphene-structure of nano-wall and flexible substrate. The micro structure comprises micro-pyramid, micro-hemisphere, micro-prism and microstrip. USE - Flexible pressure sensor based on two-dimensional quantum tunnelling force-sensitive mechanism for use in flexible touch sensor and piezoresistive sensor. ADVANTAGE - The flexible pressure sensor has ultra-high sensitive response in micro-pressure stage (less than 100Pa) detection capability, low detection limit and characteristics response time, has good protection effect for the graphene bottom electrode, expands the relative change of the current, enhance the sensitivity and response speed of the sensor, and improves the stability of the device. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a preparation method of flexible pressure sensor. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic diagram of a flexible pressure sensor based on two-dimensional quantum tunneling force-sensitive mechanism. 1Pdms 2Graphene 3Electron 4Hbn 5Single graphene layer 6Pet flexible substrate