▎ 摘　　要

NOVELTY - Substrate graphene growth manufacturing involves taking substrate and then feeding carbon-containing feed gas through electron cyclotron resonance microwave plasma enhanced chemical vapor deposition (ECR-CVD). Hydrocarbon radical is applied on substrate surface by applying van der Waals force. USE - Method for manufacturing substrate graphene growth. ADVANTAGE - The method manufactures the substrate graphene growth in a simple and cost-effective manner. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for an apparatus for manufacturing substrate graphene growth, which includes a heater and substrate.