• 专利标题:   Conductive structure for single layer structure, has work function control layer that is configured to control work function of conductive structure, where work function control layer is bonded to the conductive material layer.
  • 专利号:   EP3910664-A1, EP3910664-A4
  • 发明人:   SHIN H, KIM S, BYUN K, LEE E, KIM C, LEE C
  • 专利权人:   SAMSUNG ELECTRONICS CO LTD
  • 国际专利分类:   H01L021/20
  • 专利详细信息:   EP3910664-A1 17 Nov 2021 H01L-021/20 202195 Pages: 20 English
  • 申请详细信息:   EP3910664-A1 EP164241 23 Mar 2021
  • 优先权号:   KR058364

▎ 摘  要

NOVELTY - The conductive structure comprises a conductive material layer (210) including metal, and a work function control layer (220) bonded to the material layer. The control layer includes a two-dimensional material with a defect configured to make the work function of the structure lower than that of material layer. The material with the defect has the nanocrystalline graphene, nanocrycrystalline h-boron nitride, or nanocry crystalline transition metal dichalcogenide (TMD) compound or black phosphorus. A work function control layer is bonded to the conductive material layer. USE - Conductive structure for single layer structure or a multilayer structure. ADVANTAGE - The work function control layer is configured to control a work function of the conductive structure by being bonded to the material layer, thus controlling the work function in an efficient manner, and hence improving the performance of the metal carbide. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method of controlling a work function of metal. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the conductive structure. Conductive material layer (210) Work function control layer (220) Semiconductor Layer (230)