• 专利标题:   Preparation of nanowire and graphene composite material by providing silicon germanium-on-insulator substrate comprising silicon substrate, oxide layer and silicon germanium layer from bottom to top, and etching silicon germanium layer.
  • 专利号:   CN105174268-A
  • 发明人:   DI Z, XUE Z, ZHANG M, YE L, DAI J, WANG Z
  • 专利权人:   SHANGHAI INST MICROSYSTEM INFORMATION
  • 国际专利分类:   B82Y030/00, C01B031/04, C01B033/06, C23C016/26
  • 专利详细信息:   CN105174268-A 23 Dec 2015 C01B-033/06 201630 Pages: 12 English
  • 申请详细信息:   CN105174268-A CN10603893 21 Sep 2015
  • 优先权号:   CN10603893

▎ 摘  要

NOVELTY - A nanowire and graphene composite material is prepared by providing silicon germanium-on-insulator (SGOI) substrate comprising silicon substrate, oxide layer and silicon germanium (SiGe) layer from bottom to top, etching SiGe layer, forming strip-shaped pre-determined size SiGe array, concentrating germanium, silicon dioxide (Sio2) layer covering germanium or SiGe nanowire, removing covered SiO2 layer, and growing graphene. USE - Method for preparing nanowire and graphene composite material (claimed). ADVANTAGE - The material is uniform and straight, and has high quality, low defect and controllable size. The method is simple and controllable.