▎ 摘 要
NOVELTY - The utility model claims a middle-infrared band tunable Fano resonance resonator, belonging to technical field of infrared of resonator device in use of the graphene surface plasmon characteristics. the resonator is a three-dimensional periodic structure, the structure is composed of a top layer is a graphite disc layer, the middle layer is silicon dioxide medium layer to silicon material as substrate, formed by stacking from top to bottom of the three-layer structure. The utility model mainly through finite element method calculating the resonance spectrum of infrared wave band resonator to simulate, to optimize the resonator structure, with the middle infrared band excited Fano resonance ability and can effectively tune the Fano resonance line and resonant frequency. The utility model is structure simply, compact and rational structure and it is convenient to process.