▎ 摘 要
NOVELTY - The structure has an interconnecting medium including interconnecting dielectric layers and comprising multiple contact holes or through hole that is formed on the interconnecting dielectric layers to form a carbon nano-tube. The carbon nano-tube is provided with the contact hole or through hole. An interconnection part is arranged on a medium layer for connecting the carbon nano-tube to form graphene interconnection between multiple layers. The carbon nano-tube comprises a cavity top part that is provided with another interconnecting medium. USE - Interconnection structure. ADVANTAGE - The structure can effectively avoids the problem of copper interconnection technique due to a small part of high parasitic resistance and parasitic capacitance and effectively reduce the parasitic capacitance of the carbon nano-tube. The structure is used for connecting the carbon nano tube to the graphene nanometer belt so as to greatly reduce parasitic resistance of a medium air outlet cavity. The structure effectively reduces an interconnection resistance-capacitive (RC) delay and increases axial outgoing radiance of performance of a chip. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a method for manufacturing an interconnection structure. DESCRIPTION OF DRAWING(S) - The drawing shows a flow diagram illustrating steps involved in a method for manufacturing an interconnection structure.'(Drawing includes non-English language text)'