• 专利标题:   Interconnection structure, has interconnection part arranged on medium layer for connecting carbon nano-tube to form graphene interconnection, where tube comprises cavity top part that is provided with interconnecting medium.
  • 专利号:   CN102403304-A, WO2013082844-A1, US2014138829-A1, CN102403304-B, US9312223-B2
  • 发明人:   ZHAO Y, KANG X
  • 专利权人:   SHANGHAI IC R D CENT CO LTD, SHANGHAI INTEGRATED CIRCUIT RES DEV CE
  • 国际专利分类:   H01L021/768, H01L023/538, H01L023/522, H01L021/285, H01L023/532
  • 专利详细信息:   CN102403304-A 04 Apr 2012 H01L-023/538 201231 Chinese
  • 申请详细信息:   CN102403304-A CN10401441 06 Dec 2011
  • 优先权号:   CN10401441

▎ 摘  要

NOVELTY - The structure has an interconnecting medium including interconnecting dielectric layers and comprising multiple contact holes or through hole that is formed on the interconnecting dielectric layers to form a carbon nano-tube. The carbon nano-tube is provided with the contact hole or through hole. An interconnection part is arranged on a medium layer for connecting the carbon nano-tube to form graphene interconnection between multiple layers. The carbon nano-tube comprises a cavity top part that is provided with another interconnecting medium. USE - Interconnection structure. ADVANTAGE - The structure can effectively avoids the problem of copper interconnection technique due to a small part of high parasitic resistance and parasitic capacitance and effectively reduce the parasitic capacitance of the carbon nano-tube. The structure is used for connecting the carbon nano tube to the graphene nanometer belt so as to greatly reduce parasitic resistance of a medium air outlet cavity. The structure effectively reduces an interconnection resistance-capacitive (RC) delay and increases axial outgoing radiance of performance of a chip. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a method for manufacturing an interconnection structure. DESCRIPTION OF DRAWING(S) - The drawing shows a flow diagram illustrating steps involved in a method for manufacturing an interconnection structure.'(Drawing includes non-English language text)'