▎ 摘　　要

NOVELTY - The method involves processing graphite alkenyl sample, and clamping a standard sample manufacturing device between a sample table and a graphite alkenyl sample table. A moving element and the graphite alkenyl standard sample table are processed for ultra-precise linkage control, when setting moving displacement of a quantitative function relation. A manufacturing device is processed by graphene key scanning based on sample table actual movement length. Actual movement length is fed back to a moving control system for error compensation based on a motion component. USE - Method for compensating step size of an ultra-precise manufacturing device. ADVANTAGE - The method realizes accurate compensation of the ultra-precise manufacturing device, and has wide development prospect. DESCRIPTION OF DRAWING(S) - The drawing shows a flow representation of a method for compensating step size of an ultra-precise manufacturing device. '(Drawing includes non-English language text)'