▎ 摘 要
NOVELTY - The device (100) has a gate electrode (120) that is provided on the substrate (110), and a gate insulating film (131) which covers the gate electrode. A gate insulating film (132) is located between multiple graphene channel layers (141) which are provided on the gate insulating film (131). The source electrode (150) and drain electrode (160) are connected to both edges of multiple graphene channel layers. The gate insulating films have thickness in the range 10-200 nm. USE - Graphene electronic device such as FET and radio frequency (RF) transistor. ADVANTAGE - The channel used in FET can be operated at room temperature. The carrier mobility of the device can be increased. The driving voltage can be reduced, and the driving speed can be increased. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of graphene electronic device. Graphene electronic device (100) Substrate (110) Gate electrode (120) Gate insulating films (131,132) Multiple graphene channel layers (141) Source electrode (150) Drain electrode (160)