• 专利标题:   Laminated body for use in FET, has graphene film fixed on main surface of substrate portion, where film comprises atomic arrangement and exposed surface of graphene film is main surface of graphene film opposite to substrate portion.
  • 专利号:   US2017148880-A1, JP2017087513-A, US9806156-B2
  • 发明人:   MITSUHASHI F, ISHIZUKA T, UENO M, TSUKUDA Y, TATENO Y, SUEMITSU M, FUKIDOME H, NAGASAWA H, MIHASHI F
  • 专利权人:   SUMITOMO ELECTRIC IND LTD, UNIV TOHOKU, SUMITOMO ELECTRIC IND LTD, UNIV TOHOKU
  • 国际专利分类:   H01L021/02, H01L021/04, H01L029/06, H01L029/16, H01L029/66, H01L029/786, B32B009/00, C01B032/15, C01B032/18, C01B032/182
  • 专利详细信息:   US2017148880-A1 25 May 2017 H01L-029/16 201737 Pages: 12 English
  • 申请详细信息:   US2017148880-A1 US343679 04 Nov 2016
  • 优先权号:   JP218773

▎ 摘  要

NOVELTY - The body (1) has a substrate portion (2) composed of silicon carbide. A graphene film (3) is fixed on a main surface (2a) of the substrate portion. The graphene film comprises an atomic arrangement oriented with respect to an atomic arrangement of the silicon carbide of the substrate portion. A region in which a value of G'/G in Raman spectrometry is not less than 1.2 being not less than 10% in an area ratio in an exposed surface (3A) of the graphene film. The exposed surface is a main surface of the graphene film opposite to the substrate portion. USE - Laminated body for use in an electronic device (claimed) i.e. FET. ADVANTAGE - The body has high mobility, and can be stably secured while manufacturing an electronic device with the graphene film serving as a conductive portion. DESCRIPTION OF DRAWING(S) - The drawing shows a cross sectional view of a structure of a FET including a graphene film. Laminated body (1) Substrate portion (2) Main surface of substrate portion (2a) Graphene film (3) Exposed surface of graphene film (3A) Source electrode (4)