• 专利标题:   Graphene device e.g. graphene transistor has gate insulating layer that is mounted on capping layer to cover channel region and gate is mounted on gate insulating layer between source electrode and drain electrode.
  • 专利号:   US2015179814-A1, US9293596-B2
  • 发明人:   XIANYU W, MOON C, LEE J, LEE C
  • 专利权人:   XIANYU W, MOON C, LEE J, LEE C, SAMSUNG ELECTRONICS CO LTD
  • 国际专利分类:   H01L029/16, H01L029/66, H01L029/786, H01L027/12
  • 专利详细信息:   US2015179814-A1 25 Jun 2015 H01L-029/786 201544 Pages: 28 English
  • 申请详细信息:   US2015179814-A1 US642326 09 Mar 2015
  • 优先权号:   KR141706

▎ 摘  要

NOVELTY - The device has a source electrode that is mounted on a first region of channel layer (C1). A drain electrode is mounted on a second region of channel layer. A capping layer (CP1) that covers the channel layer, source electrode, and drain electrode, has an opening exposing a channel region of channel layer between electrodes. A gate insulating layer (IL1) is mounted on capping layer to cover channel region. A gate is mounted on gate insulating layer between source and drain electrode. The substrate includes plastic substrate, glass substrate, and silicon substrate. USE - Graphene device e.g. graphene transistor. ADVANTAGE - The position of the channel region is automatically determined by the positions of the source electrode and the drain electrode. The problems due to misalignment are prevented and suppressed. Since the gate, the source electrode, and the drain electrode are placed above the graphene layer which is used as a channel layer, it is possible to improve the degree of freedom in device design and to prevent or reduce damage to or deformation of the graphene layer. The productivity of a graphene device is increased while lowering manufacturing costs. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of the graphene device. Channel layer (C1) Capping layer (CP1) Insulating layer (IL1) Passivation layer (P1)