▎ 摘　　要

NOVELTY - Formation of graphene layer (110) on metal layer (104) arranged in process chamber of chemical vapor deposition (CVD) and tool, involves heating the chamber at 800-900 degrees C thereby heating the metal layer, introducing carbon-including deposition-gas into the chamber thereby forming carbon-including precursors and transporting the precursors to the metal layer thereby forming graphene layer on the metal layer. USE - Formation of graphene layer on metal layer used in sensing applications. ADVANTAGE - The method increases reproducibility in forming uniform graphene layer on metal and provides graphene layer having lower impedance which allows for improved sensitivity for instance w hen using the layer for sensing applications. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of material structure after the formation of graphene layer on the metal layer. Substrate (102) Metal layer (104) Insulating layer (106) Adhesion layer (108) Graphene layer (110)