• 专利标题:   Semiconductor device e.g. integrated circuit has layer of deposited capacitor material (DCM) which is set over channel region, dielectric layer that is set over DCM layer, and metallic gate electrode layer which is set over dielectric layer.
  • 专利号:   DE102020105633-A1, US2021265481-A1, CN113314520-A, KR2021109415-A, TW202133244-A, KR2368862-B1, US2022336622-A1, DE102020105633-B4
  • 发明人:   HUANG W, TSAI C, CHENG K, WANG C, CAI Q, CHENG G, WANG Z, WANGCHUN H, WANG C H, CHENG K L, TSAI C W, HUANG W C
  • 专利权人:   TAIWAN SEMICONDUCTOR MFG CO LTD, TAIWAN SEMICONDUCTOR MFG CO LTD, TAIWAN SEMICONDUCTOR MFG CO LTD, TAIWAN SEMICONDUCTOR MFG CO LTD
  • 国际专利分类:   H01L021/336, H01L027/07, H01L029/78, H01L029/92, H01L029/66, H01L021/8234, H01L027/088, H01L029/786, H01L029/423, H01L029/51, H01L021/822, H01L027/06, H01L029/06, H01L049/02, H01L021/301, H01L021/76
  • 专利详细信息:   DE102020105633-A1 26 Aug 2021 H01L-029/78 202174 Pages: 44 German
  • 申请详细信息:   DE102020105633-A1 DE10105633 03 Mar 2020
  • 优先权号:   US802396, US810684

▎ 摘  要

NOVELTY - The semiconductor device (200,300) has a substrate. Two source or drain regions (S or D regions) are set over the substrate. A channel region (210,310) is located between the two S or D regions, and is comprised of a semiconductor material. A layer of deposited capacitor material (DCM) is set over the channel region. A dielectric layer is set over the DCM layer. A metallic gate electrode layer is set over the dielectric layer. USE - Semiconductor device e.g. integrated circuit, transistor, gate-all-around transistor (GAA transistor) and FinFET. ADVANTAGE - The production efficiency is improved and costs associated with production are reduced. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for manufacturing semiconductor device. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the logic device and an integrated circuit capacitor. (Drawing includes non-English language text) Integrated circuit (100) Semiconductor device (200,300) Channel region (210,310) S or D contact (314) Gate stack (320)