• 专利标题:   Fin-type graphene device i.e. graphene FET, for e.g. optical sensor, has gate electrode placed on gate insulating layer, and source electrode and separate drain electrode that are placed on side surface of graphene channel layer.
  • 专利号:   US2016087042-A1, KR2016035505-A, US9515144-B2
  • 发明人:   LEE M, LEE J, HEO J, LEE K, LEE M H, LEE J H, HEO J S, LEE K Y
  • 专利权人:   SAMSUNG ELECTRONICS CO LTD
  • 国际专利分类:   H01L029/16, H01L029/417, H01L029/45, H01L029/786, C01B031/04, H01L021/336, H01L029/78, H01L029/788, H01L029/06, H01L029/165, H01L029/423, H01L029/778
  • 专利详细信息:   US2016087042-A1 24 Mar 2016 H01L-029/16 201624 Pages: 19 English
  • 申请详细信息:   US2016087042-A1 US747243 23 Jun 2015
  • 优先权号:   KR127192

▎ 摘  要

NOVELTY - The device (100') has a graphene channel layer (130) placed vertical to a substrate (110). A gate insulating layer (140) covers a side surface of the channel layer. A gate electrode (150) is placed on the insulating layer. A source electrode (171) and a separate drain electrode are placed on another side surface of the channel layer, and comprise catalyst metal for growing graphene. The channel layer comprises a horizontal unit (132) extending parallel to the substrate in direction of the latter side surface. The insulating layer and gate electrode overlap the horizontal unit. USE - Fin-type graphene device i.e. graphene FET (claimed), for an optical sensor and a photoelectric device. ADVANTAGE - The device increases gate voltage so as to reduce energy gap of a semiconductor layer accordingly, so that carriers injected through the source electrode move to the semiconductor layer through the graphene channel layer and finally to the drain electrode, while facilitating increased on/off ratio. DESCRIPTION OF DRAWING(S) - The drawing shows a cross sectional view of a fin-type graphene device. Fin-type graphene device (100') Substrate (110) Graphene channel layer (130) Horizontal unit (132) Gate insulating layer (140) Gate electrode (150) Source electrode (171)