• 专利标题:   Ultra-short channel transistor, has graphene layer covered on semiconductor substrate that is formed with gap, and source electrode arranged on semiconductor layer, where side part of semiconductor layer extends to semiconductor substrate.
  • 专利号:   CN106653854-A
  • 发明人:   XIE L, ZHANG G, SHI D
  • 专利权人:   CHINESE ACAD SCI PHYSICS INST
  • 国际专利分类:   H01L021/336, H01L029/06, H01L029/08, H01L029/10, H01L029/78
  • 专利详细信息:   CN106653854-A 10 May 2017 H01L-029/78 201735 Pages: 13 Chinese
  • 申请详细信息:   CN106653854-A CN10976145 07 Nov 2016
  • 优先权号:   CN10976145

▎ 摘  要

NOVELTY - The transistor has a graphene layer (103) covered on a semiconductor substrate (101) that is formed with a gap. A semiconductor layer (104) is covered on the graphene layer and the gap. A source electrode (108) is arranged on the semiconductor layer. A first portion of the graphene layer is located on the gap. A drain electrode is arranged on a second portion of the graphene layer. A side part of the semiconductor layer extends to the semiconductor substrate. A surface of the substrate is formed with an insulating layer (102). The graphene layer is formed on the insulating layer. USE - Ultra-short channel transistor. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for an ultra-short channel transistor manufacturing method. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of an ultra-short channel transistor. Semiconductor substrate (101) Insulating layer (102) Graphene layer (103) Semiconductor layer (104) Source electrode (108)