• 专利标题:   FET for electronic device, has source electrode arranged on first graphene film, second graphene film formed by double-layer graphene and gate, where gate is arranged on laminated element, and gate insulated from laminated element.
  • 专利号:   CN108054209-A, WO2019114408-A1
  • 发明人:   LIANG S
  • 专利权人:   BEIJING HUATAN TECHNOLOGY CO LTD, BEIJING HUATAN TECHNOLOGY CO LTD
  • 国际专利分类:   H01L021/336, H01L029/423, H01L029/78
  • 专利详细信息:   CN108054209-A 18 May 2018 H01L-029/78 201838 Pages: 18 Chinese
  • 申请详细信息:   CN108054209-A CN11337902 14 Dec 2017
  • 优先权号:   CN11337902

▎ 摘  要

NOVELTY - The transistor has a source electrode arranged on a first graphene film. A channel is arranged between the source electrode and a drain electrode. A second graphene element is provided with semiconductor properties of a material layer stack. A second graphene film is formed by a double-layer graphene and a gate, where the gate is arranged on a laminated element. The gate is electrically insulated from the laminated element. First and second graphene films are formed by same double-layer Graphene film. A gate insulating layer is formed on a trench with an oxide thickness of less than 2 nm. USE - FET for an electronic device (claimed). DETAILED DESCRIPTION - First and second graphene film is a double-layer Graphene film stacking. DESCRIPTION OF DRAWING(S) - The drawing shows a partial sectional view of a FET for electronic device.