▎ 摘　　要

NOVELTY - Preparing graphene micro-electro-mechanical system (MEMS) gas sensor modified based on copper oxide/indium oxide comprises dissolving copper chloride powder and sodium hydroxide powder in deionized water to form a solution, drawing sodium hydroxide solution, controlling the pH of the solution to 7 to obtain a blue suspension of copper hydroxide, washing using absolute ethanol, dissolving indium chloride hydrate crystals in deionized water to prepare a solution, and slowly dropping ammonia, stirring to obtain a white suspension of indium hydroxide, adding graphene oxide dispersion into the beaker, obtaining a black colloidal solid reduced graphene oxide-copper oxide/indium oxide, preparing aluminum-nitride ceramic substrate, silver interdigital electrode and copper heating electrode, adding acetone solution, absolute ethanol and deionized water, preparing potassium hydroxide etching solution, and coating gas-sensitive materials using terpineol. USE - The method is useful for preparing graphene micro-electro-mechanical system (MEMS) gas sensor modified based on copper oxide/indium oxide. ADVANTAGE - The method enables avoiding problem of intermediate product residue caused by one-step mixing preparation of graphene-based composite material. The proportion of the single material in the prepared composite material is controllable and more accurate. The method enables providing excellent working performance under very small volume, very low power consumption condition, with high automation degree, and better integration.