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  • 专利标题:   Conductive thin film used for electronic device, has superlattice structure having graphene films formed from sheet of carbon atoms and insertion film interposed between graphene films.
  • 专利号:   WO2012070385-A1, JP5105028-B2, JP2013008680-A, US2013230722-A1, KR2013132808-A, JP2012512126-X, JP5575852-B2
  • 发明人:   FUJII T, OGIMOTO Y, FUJII K
  • 专利权人:   FUJI ELECTRIC CO LTD, FUJI ELECTRIC CO LTD, FUJI ELECTRIC CO LTD
  • 国际专利分类:   C01B031/02, H01B005/02, H01B005/14, H01L021/3205, H01L023/52, B32B009/00, B32B018/00, H01B005/00
  • 专利详细信息:   WO2012070385-A1 31 May 2012 H01B-005/02 201241 Pages: 48 Japanese
  • 申请详细信息:   WO2012070385-A1 WOJP075814 09 Nov 2011
  • 优先权号:   JP261336, KR712456

▎ 摘　　要

NOVELTY - A conductive thin film (1000) has superlattice structure (100) having graphene film (a) (10A) formed from sheet of carbon atoms (1) of at least one atomic layer, graphene film (b) (10B) formed form sheet of carbon atoms of at least one atomic layer, and an insertion film (12) interposed between the graphene film (a) and graphene film (b). USE - Conductive thin film is used for electronic device. ADVANTAGE - The conductive thin film has high mobility and low sheet resistance. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of conductive thin film. Carbon atom (1) Atom or molecule (2,5) Graphene films (10A,10B) Insertion film (12) Substrate (50) Superlattice structure (100) Conductive thin film (1000)