▎ 摘　　要

NOVELTY - High-performance microbolometer comprises a silicon substrate (430), a silicon nitride bridge layer (440), a vanadium oxide layer, and a carbon nanotube layer or a graphene layer. The silicon substrate has a thickness of 500 micrometer and a crystal orientation according to a Miller index notation. The substrate includes a top layer of dry oxide silicon dioxide having a thickness between 200-300 nm. The bridge layer and the oxide layer have thickness of 100 nm and 200 nm, respectively. The oxide layer has a ratio of oxygen to vanadium (O/V) of 1.8-1.9. USE - Microbolometer for use in defense and commercial systems applications. ADVANTAGE - The high-performance microbolometer includes using CNTs or graphene along with vanadium oxide (VOx) to improve the TCR, noise level, and dynamic range. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of CNT-based microbolometer. 430 Substrate 440Silicon nitride bridge layer 450VOx layer 460Layers of CNTs