• 专利标题:   Thin film transistor for array substrate of display device, has active layer comprising semiconductor oxide layer and graphene layer, where active layer is formed along laminated layer.
  • 专利号:   CN104538453-A, WO2016107185-A1, US2016334918-A1, US10108291-B2, CN104538453-B
  • 发明人:   HU G, HU H
  • 专利权人:   BOE TECHNOLOGY GROUP CO LTD, BOE TECHNOLOGY GROUP CO LTD
  • 国际专利分类:   H01L021/77, H01L027/12, H01L029/267, H01L029/786, G06F003/041, G06F003/042, H01L029/22, H01L029/24, H01L027/00, H01L029/00, H01L029/16, H01L029/66
  • 专利详细信息:   CN104538453-A 22 Apr 2015 H01L-029/786 201545 Pages: 13 Chinese
  • 申请详细信息:   CN104538453-A CN10836507 29 Dec 2014
  • 优先权号:   CN10836507

▎ 摘  要

NOVELTY - The transistor has an active layer comprising a semiconductor oxide layer and a graphene layer, where thickness of the oxide layer is 600 to 2000 A. The active layer is formed along a laminated layer. Function of the oxide layer is less than function of the graphene layer. The oxide layer comprises ZnO, InO, ALO, IGZO, YZO and ITZO. Amount of a metal atom and a carbon atom in the active layer is in ratio of 1: 1-10. USE - Thin film transistor for an array substrate of a display device (all claimed). ADVANTAGE - The transistor avoids corrosion, and has high current carrier migration rate. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a method for manufacturing an array substrate. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a thin film transistor for an array substrate.