▎ 摘　　要

NOVELTY - The oscillator has a source electrode and a drain electrode mounted on a substrate (10). A metal local gate electrode is mounted on the substrate. A micron-size, atomically thin graphene resonator (11) is suspended over the metal local gate electrode, and defines vacuum gap (13) between the graphene resonator and the metal local gate electrode. The graphene resonator comprises a suspended strip of chemical vapor deposited graphene. A clamping structure (12) suspends the graphene resonator. The clamping structure defines a circular graphene drum containing diameter of about 2-4 micrometer. USE - Nano-electro-mechanical systems oscillator for use in a frequency modulated signal generator (claimed) in communication systems. ADVANTAGE - The oscillator implements different gate electrodes patterns to selectively excite certain higher order modes for enhancing quality factor and increasing resonant frequency. The oscillator eliminates complex vibrational modes due to unclamped edges without significantly degrading electronic performance of underlying graphene. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a method for fabricating a nano-electro-mechanical systems (NEMS) oscillator. DESCRIPTION OF DRAWING(S) - The drawing shows a circuit diagram of self-sustained graphene mechanical oscillator. Substrate (10) Micron-size atomically thin graphene resonator (11) Clamping structure (12) Vacuum gap (13) Directional coupler (16)