• 专利标题:   Apparatus for manufacturing non-catalytic substrate for graphene growth, for electronic component, has gas supply controller which is provided with solenoid valve for controlling the amount of the gas supplied to the gas blower.
  • 专利号:   KR2016060010-A
  • 发明人:   LEE Y T
  • 专利权人:   LEE Y T
  • 国际专利分类:   B05B001/00, B05B001/30, B05B012/02, C01B031/04, C23C016/26
  • 专利详细信息:   KR2016060010-A 27 May 2016 C01B-031/04 201641 Pages: 62
  • 申请详细信息:   KR2016060010-A KR028663 10 Mar 2016
  • 优先权号:   KR161949, KR028663

▎ 摘  要

NOVELTY - The apparatus has a coil provided with plunger which is moved when the current is supplied to the coil. A gas supply controller is provided with solenoid valve for controlling the amount of the gas supplied to the gas blower. USE - Apparatus for manufacturing non-catalytic substrate for graphene growth, for electronic component. ADVANTAGE - The non-catalytic substrate is manufactured efficiently with simple manufacturing process. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of apparatus for manufacturing substrate for graphene growth. Board layer (100) Carbon gas (300) Graphene (500)