• 专利标题:   Gating device useful for three-dimensional integration based on two-dimensional material, comprises graphene two-dimensional material layer as bottom electrode two-dimensional material layer used as functional layer and top electrode array including multi linear top electrode arranged at interval.
  • 专利号:   CN113517392-A
  • 发明人:   ZHANG W, SUN Q, HE Z, MENG J, WANG T, CHEN L
  • 专利权人:   UNIV FUDAN
  • 国际专利分类:   H01L045/00
  • 专利详细信息:   CN113517392-A 19 Oct 2021 H01L-045/00 202100 Chinese
  • 申请详细信息:   CN113517392-A CN10248349 08 Mar 2021
  • 优先权号:   CN10248349

▎ 摘  要

NOVELTY - Gating device comprises a graphene two-dimensional material layer used as bottom electrode boron nitride (BN) two-dimensional material layer i.e. as a functional layer and a top electrode array comprising a multi linear top electrodes arranged at an interval. The material of the linear top electrode is silver or copper. USE - The gating device is useful for three-dimensional integration based on two-dimensional material in electronic device. ADVANTAGE - The gating device: is compatible with two-dimensional memory structure technique; can solve the problem of the contact gating devices and two-dimensional material memory, realize the three-dimensional cross array integrated based on two-dimensional material., provided for high density three-dimensional integration of two-dimensional material groups; uses graphene two-dimensional material layer as bottom electrode BN two-dimensional layer as a functional layer i.e. used as a bottom electrode for transferring the BN material layer to the graphene two-dimensional layer, and is formed as the functional layer, thus the graphene material layer acts as a top electrode for forming the top electrodes. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for preparing the material-based gating device.