• 专利标题:   Preparing coating on carbon substrate e.g. crucible, involves mixing hydrogel and organosilane to form mixture, applying mixture to surface of carbon substrate to form first coating layer, coating organic tantalum solution on first coating to form second coating, and heating and annealing coating.
  • 专利号:   CN114368984-A, CN114368984-B
  • 发明人:   PAN Y, MA Y, PAN L, CHEN D
  • 专利权人:   CEC COMPOUND SEMICONDUCTOR CO LTD
  • 国际专利分类:   C04B041/89
  • 专利详细信息:   CN114368984-A 19 Apr 2022 C04B-041/89 202246 Chinese
  • 申请详细信息:   CN114368984-A CN10111120 27 Jan 2022
  • 优先权号:   CN10111120

▎ 摘  要

NOVELTY - The method for preparing a coating on a carbon substrate involves: (S1) mixing hydrogel and organosilane to form a mixture; (S2) applying the mixture to the surface of the carbon substrate to form a first coating layer; (S3) coating an organic tantalum solution on the first coating to form a second coating, where the second coating and the first coating form a composite coating; and (S4) heating and annealing the composite coating. The hydrogel is graphene hydrogel, polyacrylic acid, polymethacrylic acid, polyacrylamide, poly-N-polyacrylamide or chitosan. The organosilane is polysilane, polysiloxane and/or polycarbosilane. The organic tantalum is tantalum ethoxide, tantalum pentamethyl oxide, tantalum isopropoxide, tantalum butoxide and/or tantalum amyl alcohol. USE - Method for preparing a coating on a carbon substrate such as crucible (claimed). ADVANTAGE - The method effectively improve the corrosion of raw materials to a graphite crucible in the growth process of a silicon carbide crystal, effectively solve the problem of thermal mismatch caused by overlarge difference of expansion coefficients of tantalum carbide and the carbon substrate by adopting a composite coating, prevent the coating from peeling off in the use process and improve the adhesiveness of the coating. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for the coating of carbon substrate. DESCRIPTION OF DRAWING(S) - The drawing shows a flow chart of a preparation method of coating of carbon substrate. (Drawing includes non-English language text). Mixing hydrogel and organosilane to form a mixture (S1) Applying the mixture to the surface of the carbon substrate to form a first coating layer (S2) Coating an organic tantalum solution on the first coating to form a second coating, where the second coating and the first coating form a composite coating (S3) Heating and annealing the composite coating (S4)