• 专利标题:   Fabrication method of semiconductor device, involves depositing surface-sensitive conductive layer which includes topological insulators, graphene material, molybdenum compound material, and magnetic film on top of metal contacts.
  • 专利号:   US9406872-B1
  • 发明人:   ANNUNZIATA A J, CHEN C, CHUDOW J D
  • 专利权人:   INT BUSINESS MACHINES CORP
  • 国际专利分类:   G01N027/12, H01L043/04, H01L043/06, H01L043/14
  • 专利详细信息:   US9406872-B1 02 Aug 2016 H01L-043/06 201652 Pages: 17 English
  • 申请详细信息:   US9406872-B1 US941878 16 Nov 2015
  • 优先权号:   US941878

▎ 摘  要

NOVELTY - The fabrication method involves forming first metal contacts (110) on top of a substrate (105). Insulator pads (115) are formed at predefined locations on top of the first metal contacts and are spaced from one another. Second metal contacts (120) are formed on top of the insulator pads. A surface-sensitive conductive layer which includes topological insulators, graphene material, molybdenum sulfide or molybdenum selenide material, and a magnetic film is deposited on top of the metal contacts. The surface-sensitive conductive layer is etched to form conductive channels (310). USE - Fabrication method of semiconductor device. ADVANTAGE - The semiconductor device is protected by depositing a dielectric cap or removing a sacrificial layer on top of the active region to form a vacuum cap. The second layer of metal-rib contacts is formed on top of the first metal-rib array with the thin insulating pads underneath to prevent interlayer shorting. The surface-sensitive conductive layer is conformally deposited on top of the metal-rib contacts, the thin insulating pads, and the non-conducting substrate, such that the surface-sensitive conductive layer conforms to the shape of the elements below. DESCRIPTION OF DRAWING(S) - The drawing shows the schematic top-down view of an individual four-terminal device. Substrate (105) First metal contacts (110) Insulator pads (115) Second metal contacts (120) Conductive channels (310)