• 专利标题:   Method for forming graphene pattern, involves locating metal layer at downward and outer side of removed oxide layer that is removes partial domain of oxide layer, and depositing exposure field graphene on chemical vapor deposition.
  • 专利号:   KR2012009323-A, KR1332635-B1
  • 发明人:   GWAN K J, HO J J, HYE L J, HYEOK C J, GEUN C D, DON K G, KIM J K, JEONG J H, LEE J H, CHOI J H, CHOI D G, KIM K D
  • 专利权人:   KOREA INST MACHINERY MATERIALS, KOREA INST MACHINERY MATERIALS
  • 国际专利分类:   B82B003/00, H01L021/205
  • 专利详细信息:   KR2012009323-A 01 Feb 2012 B82B-003/00 201218 Pages: 12
  • 申请详细信息:   KR2012009323-A KR071510 23 Jul 2010
  • 优先权号:   KR071510

▎ 摘  要

NOVELTY - The method involves laminating an oxide layer on a metal layer. A metal layer is located at a downward and an outer side of a removed oxide layer that removes a partial domain of the oxide layer. An exposure field graphene is selectively deposited on a chemical vapor deposition (CVD). An upper side of the oxide layer is coated with a photoresist. The oxide layer is removed through a dry etch. The oxide layer is made of silicon dioxide (SiO2) or titanium dioxide (TiO2). The metal layer is made of cobalt (Co), platinum (Pt), iridium (Ir), ruthenium (Rb), nickel (Ni) and copper (Cu). USE - Method for forming a graphene pattern. ADVANTAGE - The method enables depositing graphene micro-pattern on the large size of a substrate with the chemical vapor deposition. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic representation of a method for forming graphene pattern.