• 专利标题:   Method for manufacturing semiconductor device, involves forming graphene layer on insulating layer, forming gate structure on graphene layer, and forming doped region in semiconductor substrate.
  • 专利号:   CN102651397-A, CN102651397-B
  • 发明人:   LUO Z, YIN H, ZHU H
  • 专利权人:   INST MICROELECTRONICS CHINESE ACAD SCI
  • 国际专利分类:   H01L021/04, H01L029/78
  • 专利详细信息:   CN102651397-A 29 Aug 2012 H01L-029/78 201304 Pages: 8 Chinese
  • 申请详细信息:   CN102651397-A CN10045404 24 Feb 2011
  • 优先权号:   CN10045404

▎ 摘  要

NOVELTY - The method involves providing a semiconductor substrate in a gate electrode structure, forming an insulating layer on the semiconductor substrate, and forming a graphene layer on the insulating layer. A gate structure is formed on the graphene layer, and a doped region is formed in the semiconductor substrate. The semiconductor substrate is made of silicon, and the insulating layer is made of silicon oxide. USE - Method for manufacturing a semiconductor device. ADVANTAGE - The method enables manufacturing the semiconductor device with better external resistance. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a semiconductor device. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a semiconductor device.