• 专利标题:   Producing graphene, useful in spintronic device, comprises spacing source of silicon from silicon carbide substrate in pressure vessel, reducing pressure to vacuum and heating silicon source to evaporate silicon and heating the substrate.
  • 专利号:   US2011223094-A1, US8142754-B2
  • 发明人:   LANZARA A, SCHMID A K, YU X, HWANG C, KOHL A, JOZWIAK C M
  • 专利权人:   UNIV CALIFORNIA
  • 国际专利分类:   C01B031/00, C01B031/02, B01J019/08
  • 专利详细信息:   US2011223094-A1 15 Sep 2011 C01B-031/02 201163 Pages: 11 English
  • 申请详细信息:   US2011223094-A1 US043329 08 Mar 2011
  • 优先权号:   US313214P, US043329

▎ 摘  要

NOVELTY - Producing graphene, comprises: spacing a source of silicon from a silicon carbide substrate in a pressure vessel, reducing the pressure in the vessel to vacuum and heating the silicon source to a first temperature to evaporate silicon from its opposing surface, while simultaneously, heating the silicon carbide substrate to a second temperature to anneal the substrate; or closely spacing two silicon carbide substrates in a pressure vessel, reducing the pressure in the vessel to vacuum, heating the silicon carbide wafers facing with each other to a target temperature, and maintaining the wafers. USE - The graphene is useful in post-complementary metal oxideusemiconductor digital electronics, single-molecule gas sensors, and spintronic devices. ADVANTAGE - The method provides graphene of large length scales with high quality and yield in an economical manner. DETAILED DESCRIPTION - Producing graphene, comprises: spacing a source of silicon from a silicon carbide substrate in a pressure vessel, reducing the pressure in the vessel to vacuum and heating the silicon source to a first temperature to evaporate silicon from its opposing surface, while simultaneously, heating the silicon carbide substrate to a second temperature to anneal the substrate; or closely spacing two silicon carbide substrates in a pressure vessel, reducing the pressure in the vessel to vacuum, heating the silicon carbide wafers facing with each other to a target temperature, and maintaining the silicon carbide wafers at that temperature for a certain period of time to form graphene. An INDEPENDENT CLAIM is included for the graphene produced by the above method. DESCRIPTION OF DRAWING(S) - The figure shows a schematic view of a furnace for producing a graphene. Vacuum furnace (110) Convectron gauge (122) Ion gauge (124) Chamber (126) Valve. (128)