• 专利标题:   Transferring two-dimensional material to hole substrate used in thermology application, by adhering polydimethylsiloxane film on slide, stripping two-dimensional material block to be transferred to film, fixing slide with formed material in substrate, heating and separating film from substrate.
  • 专利号:   CN113851371-A
  • 发明人:   LIU J, CHEN Y, ZHENG X, WEI Y, SU Y, DENG C, ZHANG X
  • 专利权人:   UNIV XIAMEN
  • 国际专利分类:   H01L021/02, H01L021/027
  • 专利详细信息:   CN113851371-A 28 Dec 2021 H01L-021/02 202223 Chinese
  • 申请详细信息:   CN113851371-A CN11307372 05 Nov 2021
  • 优先权号:   CN11307372

▎ 摘  要

NOVELTY - Transferring a two-dimensional material to hole substrate involves: (1) adhering polydimethylsiloxane (PDMS) film on a glass slide; (2) stripping two-dimensional material block to be transferred to the PDMS film obtained in step (1) by mechanical stripping method; (3) finding the two-dimensional material after stripping under a microscope, and cutting off the excess PDMS film; (4) fixing the glass slide with the material obtained in step (3) in a substrate card slot of a two-dimensional material transfer table; (5) adsorbing a silicon substrate with holes on a sample holder of a transfer stage; (6) aligning the material obtained in step (4) with the hole on the silicon substrate, and heating the PDMS film to partially contact the silicon substrate; (7) continuously heating, so that the PDMS film spontaneously adheres closely to the silicon substrate; and (8) cooling to separate the PDMS film from the silicon substrate. USE - The method is useful for transferring two-dimensional material to hole substrate used in photoelectric, electron and thermology applications. ADVANTAGE - The method: transfers the two-dimensional materials to the silicon substrates with holes by adjusting the viscosity of PDMS films by changing the temperature; cleans the surface of the transferred sample for pure dry transfer; is simple in operation, and not necessary to implement the temperature control of the PDMS film besides the transfer table by using too many experimental instruments; and solves the low dry transfer success rate caused by weak adhesion of the material to the substrate.