▎ 摘 要
NOVELTY - A graphene film is formed by reduction process (a) which heats metal film in atmosphere containing hydrogen gas, graphene film growth process (b) which heats heated metal film in mixed gas atmosphere containing 10-1000 ppm propylene gas and hydrogen gas, and cooling process (c) which cools superheated metal film. USE - Formation of graphene film used for electronic materials, semiconductor thin film, electrode material and transparent conductive film for electronic device or energy device. ADVANTAGE - Graphene film has in-plane uniformity and high reproducibility, and less damage. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the process of forming the graphene film. (Drawing includes non-English language text). Reduction process (a) Graphene film growth process (b) Cooling process (c)