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  • 专利标题:   Preparing graphene nano belt used for preparing electronic devices, involves carrying out metal catalyzed etching method to obtain nano strip shaped groove structure set with hexagonal boron nitride groove module.
  • 专利号:   CN104726845-A, JP2016028012-A, JP6177295-B2, CN104726845-B
  • 发明人:   HE L, JIANG M, LI L, XIE X, TANG S, ZHANG D, XIE H, WANG H, CHEN L
  • 专利权人:   SHANGHAI MICROSYSTEM INFORMATION INST, SHANGHAI INST MICROSYSTEM INFORMATION, SHANGHAI MICROSYSTEM INFORMATION INST
  • 国际专利分类:   C23C016/02, C23C016/26, C01B031/02, C23C014/06, C01B032/186
  • 专利详细信息:   CN104726845-A 24 Jun 2015 C23C-016/26 201571 Chinese
  • 申请详细信息:   CN104726845-A CN10098675 05 Mar 2015
  • 优先权号:   CN10098675

▎ 摘　　要

NOVELTY - Preparing graphene nano belt involves carrying out metal catalyzed etching method to obtain nano strip shaped groove structure set with hexagonal boron nitride groove module. The chemical vapor deposition method is carried out to grow graphene nano belt and hexagonal boron nitride groove module. USE - Method for preparing graphene nano belt used for preparing electronic devices (claimed). ADVANTAGE - The method enables to prepare graphene nano belt in easy and cost-effective manner that has high carrier migration rate and increased performance.