▎ 摘　　要

NOVELTY - The magnetic sensor has a graphene layer that is epitaxially grown on the substrate. The substrate is set on the lower surface parallel to the device surface for sensing magnetic field of the vertical Hall sensor. The graphene layer set on the upper surface is used for sensing perpendicular to the surface magnetic field of device cross-shaped horizontal Hall sensor. The four ends of the cross-shaped horizontal Hall sensor cross-shaped are respectively provided with signal input electrode (V1), a signal input electrode (V2), sensing electrode and sensing electrode. The signal input electrode is opposite to the other signal input electrode, and the sensing electrode is connected with the other sensing electrode. The signal input electrode and the signal input electrode are simultaneously in contact with the substrate and the graphene layer. USE - Magnetic sensor with ultra-high three-dimensional magnetic field detection sensitivity used in miniature wearable such as military, medicine and aerospace. ADVANTAGE - The sensor reduces the volume of the sensor, has good application prospect and is compatible with the integrated circuit technology for large scale production. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a manufacturing method of a magnetic sensor with ultra-high three-dimensional magnetic field detection sensitivity. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic diagram of a magnetic sensor. Sensing electrode (H3,H4) Signal input electrode (V0-V4)