• 专利标题:   Method for transferring graphene elements onto substrate, involves introducing graphene element onto liquid film, and reducing distance between substrate and graphene element until graphene elements are set on placeholders of substrate.
  • 专利号:   DE102015016143-A1, WO2017097279-A1, EP3386914-A1, US2018342586-A1
  • 发明人:   KIREEV D, SARIK D, WOLFRUM B, OFFENHAEUSSER A, OFFENHAUSSER A
  • 专利权人:   FORSCHUNGSZENTRUM JUELICH GMBH, FORSCHUNGSZENTRUM JUELICH GMBH, FORSCHUNGSZENTRUM JUELICH GMBH
  • 国际专利分类:   H01L021/02, H01L021/20, H01L021/84, H01L027/12, C01B032/194, H01L029/16, B32B037/18, B32B003/14, B32B009/00
  • 专利详细信息:   DE102015016143-A1 14 Jun 2017 H01L-021/02 201741 Pages: 21 German
  • 申请详细信息:   DE102015016143-A1 DE10016143 12 Dec 2015
  • 优先权号:   DE10016143

▎ 摘  要

NOVELTY - The method involves selecting substrate with placeholders for graphene elements. The substrate is arranged and aligned on substrate holder in chamber, and transfer layer (31) with openings is selected as placeholder for graphene elements. The liquid is filled into chamber up to above transfer layer. The transfer layer is lifted on liquid column, and graphene elements are introduced onto liquid film in openings of transfer layer. The distance between substrate and graphene elements is reduced until graphene elements are arranged on placeholders of substrate. USE - Method for transferring graphene elements onto substrate (claimed). ADVANTAGE - The use of APTES molecules increases hydrophilicity of surface, so that the adhesion and the process are simplified. The economic efficiency of transferring graphene elements onto substrate is improved, and the fabrication cost of the substrate is reduced. DETAILED DESCRIPTION - The transfer layer is arranged and aligned on substrate holder over substrate such that openings of transfer layer are aligned over placeholders on substrate. INDEPENDENT CLAIMS are included for the following: (1) substrate; and (2) device for transferring graphene elements onto substrate. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the transfer layer. Transfer layer (32) OEffnungen (33) Quadratic mark (34) Protuberance (35) Transfer layer edge (36)